This piece of equipment is used for non-contact surface analysis (roughness / waviness) or 3D topography measurements. It has an Air ride table for vibration isolation, and the software is capable of combining multiple measurements into a single larger surface measurement (stitching).
- vertical scan range, 150 micometers
- vertical resolution, .1 nanometer
- lateral resolution, .36 to 5.18 micrometer (objective dependent)