Zygo NewView 600
This piece of equipment is used for non-contact surface analysis (roughness / waviness) or 3D topography measurements. It has an Air ride table for vibration isolation, and the software is capable of combining multiple measurements into a single larger surface measurement (stitching). vertical scan range, 150 micometers vertical resolution, .1 nanometer lateral resolution, .36 to 5.18 micrometer (objective dependent)
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